By Topic

A static turbine flow meter with a micromachined silicon torque sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Svedin, N. ; Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden ; Stemme, E. ; Stemme, G.

A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. In contrast to conventional turbine meters, the wheel does not rotate and consequently it is not sensitive to bearing friction and wear that a rotating wheel experiences. The sensor performance has been evaluated for different blade lengths and blade angles and a model is given to predict the influence of these parameters. Optimization of the wheel can be done in terms of maximizing the sensitivity/pressure-loss ratio. The most efficient wheel in this analysis has a blade length of 2.7 mm and a blade angle of 30/spl deg/ giving a sensitivity of 4.0 /spl mu/V/V/(1/min) when measured using a new silicon torque sensor design.

Published in:

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Date of Conference:

25-25 Jan. 2001