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A gyroscope array with linked-beam structure

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4 Author(s)
Seokyu Kim ; Sch. of Electr. Eng., Seoul Nat. Univ., Kwanak, South Korea ; Byeungleul Lee ; Joonyeop Lee ; Kukjin Chun

This paper presents a gyroscope array with linked-beam structure. The proposed gyroscope was fabricated by surface micromachining technology with 15 /spl mu/m-thick polycrystalline silicon. A dichloro-dimethylsilane (DDMS, (CH/sub 3/)/sub 2/SiCl/sub 2/) grafting as a new anti-stiction method was used to release up to a 9-cell gyroscope array. This paper analyzes the feasibility of the gyroscope array with capacitive inertial sensing as a high performance gyroscope with respect to thermal and rotational noise. The fabricated quad-cell gyroscope shows that the electrical noise equivalent rate is about 0.01 deg/sec, sensitivity is 93 mV/deg/sec, and its dynamic range is 100 deg/sec.

Published in:

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Date of Conference:

25-25 Jan. 2001