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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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Presents the front cover and table of contents from the conference proceedings.

Published in:
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Date of Conference: 25-25 Jan. 2001

Meeting Date :
21 Jan 2001-25 Jan 2001
ISSN :
1084-6999
Print ISBN:
0-7803-5998-4
INSPEC Accession Number:
6905714
Conference Location :
Interlaken, Switzerland
Digital Object Identifier :
10.1109/MEMSYS.2001.906461
Product Type:
Conference Publications

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