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Different PMOS hot carrier degradation mechanisms are observed in a 0.13 /spl mu/m CMOS technology with ultra-thin gate oxide. Surprisingly, the gate voltage plays a significant role in total Idsat degradation, even at low temperature (40/spl deg/C). Hole trapping instead of electron trapping is observed under max Idsat degradation condition for PMOS. It is also shown that nitrogen affects NMOS and PMOS hot carrier degradation differently.