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Fabrication of amorphous carbon films by using organic hydrocarbon source

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4 Author(s)
J. Xu ; Dept. of Phys., Nanjing Univ., China ; W. Li ; K. J. Chen ; J. B. Xu

Hydrogenated amorphous carbon films were prepared by using organic hydrocarbon source, xylene, in a plasma enhanced chemical vapor deposition (PECVD) system. The microstructures and optical properties were investigated by using various kinds of techniques. It was found that there exist sp2-structures with aromatic clusters in the films. Moreover, in contrast to a broad single PL peak in methane-based a-C:H films, the PL spectrum of xylene-based a-C:H films contains multiple peaks in blue-green light region, which is influenced by rf power. Field emission was also observed among xylene-based a-C:H films with a high sp2 content ratio

Published in:

Electron Devices Meeting, 2000. Proceedings. 2000 IEEE Hong Kong

Date of Conference:

2000