Referenced Items are not available for this document.
The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 μV/Pa in the required frequency range of 0 to 100 Hz
Published in:
Electrical Insulation, IEEE Transactions on
(Volume:24
,
Issue:
2
)
Date of Publication: Apr 1989
- Page(s):
- 267 - 276
- ISSN :
- 0018-9367
- INSPEC Accession Number:
- 3476987
- Digital Object Identifier :
- 10.1109/14.90285
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Apr 1989
- Sponsored by :
- IEEE Dielectrics and Electrical Insulation Society
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