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An on-chip coupling capacitance measurement technique

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3 Author(s)
P. A. Nair ; Dept. of Electr. Eng., Indian Inst. of Technol., Bombay, India ; A. Gupta ; M. P. Desai

We describe a technique for the accurate measurement of on-chip coupling capacitance using a Charge Based Coupling Capacitance Measurement (CBCCM) Technique. Detailed circuit simulations show that this method can measure sub-femtofarad coupling capacitance values, and can be used to isolate and measure components of device capacitance as well

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VLSI Design, 2001. Fourteenth International Conference on

Date of Conference: