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Determining the capacity components of multi chamber systems

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3 Author(s)
Mcclintock, M. ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA ; Martin, D. ; Woods, R.

In order to effectively manage productivity improvements for equipment in a semiconductor manufacturing line, it is necessary to understand and measure all the components of capacity loss for each tool type. This paper describes a data analysis system that was developed to specifically address the unique issues in understanding the capacity components of multi chamber systems. The analysis system expresses all components of capacity loss for all chambers in each tool in terms of a full tool equivalent (FTE)

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Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI

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