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A comparison of inspection strategy models for optimized tool utilization

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1 Author(s)
Skumanich, A. ; Appl. Mater. Inc., Santa Clara, CA, USA

Given the complexity of fabrication as design rules shrink and the need to appropriately allocate resources, it is becoming increasingly important to determine the optimal inspection strategy. There are some simple models that can provide a general understanding of the trade-off between the specific inspection conditions and the tools required. These models can be useful to establish the risks and benefits from various allocations and inspection conditions. The implications of the different approaches can be more readily quantified based on this type of analysis, and can assist in optimization of inspection strategies

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Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI

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