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Case study for root cause analysis of yield problems

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3 Author(s)
D. Malinaric ; Atmel Corp., Colorado Springs, CO, USA ; R. R. Hoffmeister ; C. Sun

New RAD (rapid application development) tools, software and high performance database technology enable development of analysis software that performs tasks that were either too complex or time-consuming with older technology. The Klarity ACE (Advanced Correlation Engine) software package was specifically developed to meet the analysis needs of practicing semiconductor professionals. It can be applied to the needs of yield, product development, and test engineers and also provides many tools for process engineers to analyze detailed processing equipment data such as chamber etch rates, gas flows, and equipment-related data. Besides supplying tools for routine analysis tasks such as making control and capability charts; advanced features such as commonality analyses and tool variance and sensitivity are included

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Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI

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