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Optical emission reference data for the GEC reference cell

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4 Author(s)
Collard, C. ; Dept. of Nucl. Eng., Michigan Univ., Ann Arbor, MI, USA ; Shannon, S. ; Holloway, J.P. ; Brake, M.L.

A complete set of optical emission data for the gaseous electronic conference reference cell (GEC) is presented for discharges at 75, 100, 150, and 200 V peak-to-peak and at pressures of 100, 250, 500, and 1000 mtorr. When the GEC project was initiated, these were the setpoints that were to be examined. This paper provides a set of data that can be used as a comparison for other diagnostics. The emission is compared to metastable data obtained from laser-induced fluorescence in helium and argon and computer generated data of the argon metastable data. There is good agreement between these three sets of data and the profiles found in this paper, which can be used as a consistency check for the capacitively coupled GEC reference cell. The data presented were collected with an automated scanning sensor, which gathers wedges of optical emission (Ar I 750.4 nm), at ten vertical heights parallel to the bottom electrode surface. The digitized data was converted to emissivity data as a function of radius using a Tikhonov regularization method

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Plasma Science, IEEE Transactions on  (Volume:28 ,  Issue: 6 )