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The electrical properties and device applications of homoepitaxial and polycrystalline diamond films

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3 Author(s)
G. S. Gildenblat ; Pennsylvania State Univ., University Park, PA, USA ; S. A. Grot ; A. Badzian

Electronic applications of semiconductor diamonds are addressed. Doping and electrical properties of these films, formation of low-resistive `ohmic' contacts, surface modification methods, and experimental device applications are discussed. Of particular interest are high-temperature (300°C) MOSFETs and metal contacts to CVD (chemical vapor deposition) diamond films which were used to fabricate high-temperature (580°C) Schottky diodes, rudimentary MESFETs, and blue light-emitting diodes (LEDs). The status of the emerging technology is reviewed with an emphasis on the areas of current research activity

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Proceedings of the IEEE  (Volume:79 ,  Issue: 5 )