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Vertical-cavity surface-emitting lasers: Design, growth, fabrication, characterization

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5 Author(s)
Jewell, J.L. ; AT&T Bell Labs., Holmdel, NJ, USA ; Harbison, J.P. ; Scherer, A. ; Lee, Y.H.
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The authors have designed, fabricated, and tested vertical-cavity surface-emitting lasers (VCSEL) with diameters ranging from 0.5 μm to>50 μm. Design issues, molecular beam epitaxial growth, fabrication, and lasing characteristics are discussed. The topics considered in fabrication of VCSELs are microlaser geometries; ion implementation and masks; ion beam etching packaging and arrays, and ultrasmall devices

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Quantum Electronics, IEEE Journal of  (Volume:27 ,  Issue: 6 )