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Suppression of leakage resonance in coplanar MMIC packages using a Si sub-mount layer

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3 Author(s)
Sung-Jin Kim ; Dept. of Electron. Eng., Ajou Univ., Suwon, South Korea ; Ho-Sung Yeon ; Hai-Young Lee

In this paper, we examined the parasitic leakage resonance of coplanar monolithic microwave and millimeter-wave integrated circuits (MMICs) by the finite-difference time-domain calculations and experiments. The results show that leakages from coplanar MMICs become significantly resonant in finite substrates and packaging enclosures. In order to avoid the leakage resonance, a resonance suppression method using a doped-Si sub-mount layer is proposed and experimented in a frequency range from 0.5 to 40 GHz. The resonance suppression scheme is verified by measuring the S-parameters of the fabricated conductor-backed coplanar waveguides having an Si sub-mount layer of different resistivities (1 mΩ·cm, 15 Ω·cm, and 4 kΩ·cm). The leakage resonance can be completely suppressed using the typical 15 Ω·cm Si sub-mount layer

Published in:

IEEE Transactions on Microwave Theory and Techniques  (Volume:48 ,  Issue: 12 )