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A low-voltage actuated micromachined microwave switch using torsion springs and leverage

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2 Author(s)
Dooyoung Hah ; Dept. of Electr. Eng. & Comput., Korea Adv. Inst. of Sci. & Technol., Taejon ; Songcheol Hong

In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is ~5 V. The insertion loss of ~1 dB and the isolation as high as ~40 dB at 1 GHz are achieved by the push-pull operation

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:48 ,  Issue: 12 )