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Surface acoustic wave reflection from diamond-like carbon thin film reflecting arrays on LiNbO/sub 3/ substrates

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6 Author(s)
Zhgoon, S. ; Moscow Power Eng. Inst., Russia ; Zhang, Q. ; Yoon, S.F. ; Revkov, A.
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Surface acoustic wave (SAW) reflection from diamond-like carbon (DLC) strip reflecting arrays on Y-Z LiNbO/sub 3/ is investigated. The reflection from DLC strips with triangular cross section has been observed. Reflection increases in alternating DLC and Al strips in 90/spl deg/ reflecting arrays in comparison with pure Al structures. The values of reflection coefficient per period in the slanted reflecting arrays are estimated to be about 1.0% for pure DLC strips (height to wavelength ratio equal to 0.02), 2% for uniform Al coating on DLC reflecting arrays, and 3.5% for alternating DLC and Al strips. This value is higher than that for pure Al strips by about 0.7%. Reflection properties are briefly discussed, and preparation technique is presented.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:48 ,  Issue: 1 )