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Calculation of RF-MEMS inductors using partial element equivalent circuits

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3 Author(s)
Zhang Yaojiang ; Dept. of Electron. Eng., Tsinghua Univ., Beijing, China ; Long Haibo ; Feng Zhenghe

RF-MEMS inductor is a crucial component in radio-frequency integrated circuits (RFIC). Partial element equivalent circuits (PEEC) method is used to model a spiral inductor as a two-port equivalent lumped circuit. Numerical examples showed that the method is easily implemented and accurate in analysis of both planar and three-dimensional inductors

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Microwave and Millimeter Wave Technology, 2000, 2nd International Conference on. ICMMT 2000

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