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Optimized step controller for a salient-pole micromotor

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2 Author(s)
Kucukkomurler, A. ; Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA ; Garverick, S.L.

This paper describes a controller which optimizes the step response of a silicon, micromachined, electrostatic salient-pole micromotor. The control algorithm is based on the determination of two parameters, the critical and final times of the step response, which are obtained from a second-order differential equation of the micromotor model. The parameter values have been determined utilizing both analytical and empirical methods, which yield similar results

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National Aerospace and Electronics Conference, 2000. NAECON 2000. Proceedings of the IEEE 2000

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