Summary form only given. We report the fabrication techniques for flip-chip integration of selectively oxidized 850 nm 8x8 individually addressable VCSEL arrays. For robust integration of 2-dimensional 850 nm VCSEL arrays to microelectronics, there are three challenges to overcome: 1) reliable bonding; 2) mechanically stable packaging; and 3) through substrate light emission
Published in:
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
(Volume:2
)
Date of Conference: 2000