A VCSEL array at a wavelength of 850 nm for application to optical parallel interconnection was developed. A uniform array on a p-type substrate was fabricated and installed in a 60-Gps-class parallel-interconnection module. A high polarization control was obtained for devices with strained quantum wells grown on a (311)B substrate. An index-guided semiconductor buried structure was fabricated to control the lateral mode. An air-post VCSEL array was fabricated on a (100) p-type substrate so that it could be driven by a bipolar transistor IC
Published in:
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
(Volume:2
)
Date of Conference: 2000