Cart (Loading....) | Create Account
Close category search window
 

Preparation and properties of vanadium dioxide thin films for uncooled microbolometer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Changhong Chen ; Huazhong Univ. of Sci. & Technol., Wuhan, China ; Xinjian Yi ; Xingrong Zhao ; Bifeng Xiong

Vanadium dioxide thin films are used for uncooled microbolometers due to their high temperature coefficient of resistance (TCR). This paper describes the preparation and properties of the films. The films are deposited on a quartz substrate by low temperature reactive ion-beam sputtering and post annealing at a temperature of 500/spl deg/C. The X-ray photoelectron spectroscopy (XPS) indicates that the films are mixed vanadium oxides of mainly V/sup 4+/ and V/sup 5+/. The TCR value of -1.86%K/sup -1/ at a temperature of 25/spl deg/C is achieved through electrical conductivity measurements.

Published in:

Infrared and Millimeter Waves, 2000. Conference Digest. 2000 25th International Conference on

Date of Conference:

12-15 Sept. 2000

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.