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Design of a phase-shifting optical feedback interferometer using an electrooptic modulator

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3 Author(s)
N. Servagent ; Dept. of Autom. Control & Prod. Syst., Ecole des Mines, Nancy, France ; T. Bosch ; M. Lescure

A laser sensor using optical feedback interferometry has been designed to measure displacements up to several micrometers. For this purpose, a lithium niobate crystal generates a phase shift in order to modulate at a frequency of 580 kHz the optical path difference between the sensor and the target. This setup has been calibrated by means of a commercial optical fiber sensor. The overall accuracy resulting is better than 65 nm for a 1-kHz sinusoidal motion of the target at 10 cm away from the sensor.

Published in:

IEEE Journal of Selected Topics in Quantum Electronics  (Volume:6 ,  Issue: 5 )