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Anodic alumina based electrostatic micro-relay MEMS device

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3 Author(s)
Efremov, G.I. ; Inst. of Electron., Acad. of Sci., Minsk, Byelorussia ; Mukhurov, N.I. ; Kovalevsky, V.I.

The electrostatic micro-relay version described consists of a basic substrate and a plate with an elastic movable anchor formed of anodic alumina connected rigidly to each other. The correlation between electrostatic and reactive mechanical forces is given for the dynamic operation mode. This correlation could be applied to calculate movable elements of electrostatic micro-relays of analogous designs using other materials

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Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on

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