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Morphology and electrical behaviour of Pd2Si/p-Si junctions

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7 Author(s)
Horvath, Z.J. ; Res. Inst. for Tech. Phys. & Mater. Sci., Hungarian Acad. of Sci., Budapest, Hungary ; Kumar, J. ; Dobos, L. ; Pecz, B.
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Dendrite like morphology was observed in Pd2Si/p-Si junctions. The obtained high ideality factors and the significant difference between the apparent barrier heights evaluated from the current-voltage and capacitance-voltage measurements are explained on the basis of this morphology

Published in:

Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on

Date of Conference:

2000

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