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Structural and functional properties of SnO2 sol-gel derived thin films for integrated gas sensors

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6 Author(s)
Cobianu, C. ; Inst. of Microtechnol., Bucharest, Romania ; Savaniu, C. ; Siciliano, P. ; Capone, S.
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We present the structural and gas sensing properties of the sol-gel derived SnO2 thin films exposed to small concentrations of reducing and oxidant ambient. XRD investigations show the structural evolution of the film as a function of sol-gel processing parameters. Nanometric grain size relation to metal atom doping has been obtained. For the functional characterisation of our SnO2 sensing films, we propose an integrated technology for a simple test microstructure, based on resistive heater made of boron doped silicon and W/Au metallization for both sensor electrodes and heater contact. AFM investigations of SnO2 thin films revealed the morphology of the films used for gas sensing applications. A test structure having medium electrical power consumption (below 900 mW) was used for the detection of the controlled concentrations of CH4, CH3 COOH, and NO2 at low temperatures

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Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

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