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Technology for field emission pressure sensors

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8 Author(s)
Angelescu, A. ; Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania ; Kleps, I. ; Pavelescu, I. ; Nicolaescu, D.
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The technological process for the fabrication of a novel field emission pressure sensor is presented. The silicon microprocessed device integrates a field emission microtriode array and a membrane anode. The sensor works in a differential mode and is intended for low-pressure measurements

Published in:

Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

Date of Conference:

2000