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Silicon based micromachining technology for advanced microwave and millimeter wave applications

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5 Author(s)
Grenier, K. ; Lab. d''Autom. et d''Anal. des Syst., CNRS, Toulouse, France ; Pons, P. ; Parra, T. ; Graffeuil, J.
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This paper outlines the capabilities of silicon micromachining technology for the realization of passive elements featuring high performance. We also present the design method that has to be invoked in order to get good results in a very short time

Published in:

Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

Date of Conference:

2000