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Using spectroellipsometry to examine multilayer gratings for sensors and photodetectors

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5 Author(s)
Dmitruk, N.L. ; Inst. for Phys. of Semicond., Acad. of Sci., Kiev, Ukraine ; Mayeva, O.I. ; Mamykin, S.V. ; Yastrubchak, O.B.
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A characterization program for multilayer gratings for sensors and photodetector applications have been designed and an examination of the multilayer gratings has been performed

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Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

Date of Conference: