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Experimental validation of mechanical stress models by micro-raman spectroscopy

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7 Author(s)
de Wolf, I. ; IMEC ; Pozzat, G. ; Pinardl, K. ; Howard, D.J.
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First Page of the Article

Published in:
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on

Date of Conference: 1996

Page(s):
1751 - 1754
Print ISBN:
0-7803-3369-1
Digital Object Identifier :
10.1109/ESREF.1996.888208
Product Type:
Conference Publications

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