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Surface displacement mapping of piezoelectric multilayer actuators

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3 Author(s)
M. Stewart ; Nat. Phys. Lab., Teddington, UK ; M. G. Cain ; W. Battrick

At NPL, methods of measurement have been developed to accurately measure the piezoelectric displacement of a variety of piezoceramics. In this work package the focus is not so much on accuracy and traceability but on developing techniques for the point-to-point scanning of actuators. This means that the piezoelectric displacement is measured on a small region of the sample and then either the sample or the measuring probe is scanned in order to build up a map of displacement behaviour. Two optical techniques have been explored in this paper: 1. Laser Doppler vibrometer and 2. Laser triangulation. Both measurement methods have successfully revealed sub-surface features within specially fabricated multilayer-actuators

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Dielectric Materials, Measurements and Applications, 2000. Eighth International Conference on (IEE Conf. Publ. No. 473)

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