Self-assembled 3-D silicon microscanners with self-assembled electrostatic drives

Three-dimensional, electrostatically driven resonant torsion mirror microscanners are constructed by surface tension powered out-of-plane rotation of parts formed in bonded silicon-on-insulator. Simultaneous self-assembly of the fixed electrodes using a below-substrate limiter mechanism allows scanning perpendicular to the assembly axis, and direct drive allows high-Q operation.