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An approximate two-order increase in magnitude in electroluminescence was observed for the metal-oxide-silicon tunneling diodes with oxide grown at 900/spl deg/C, as compared to 1000/spl deg/C. The X-ray reflectivity revealed that the oxide grown at 900/spl deg/C has rougher interface than that grown at 1000/spl deg/C. The role of interface roughness can be understood in a model composed of phonons and interface roughness. An external quantum efficiency of /spl sim/10/sup -6/ was obtained using Al electrodes.