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Characterization of the elastic properties of metrological quartz crystal resonators using acoustic force microscopy

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2 Author(s)
Sthal, F. ; LCEP-ENSMM, Besancon, France ; Bourquin, R.

A new method of characterizing resonators is presented. This method is based on scanning acoustic force microscopy. Data on the topography and the vibration amplitude of the resonator are obtained at once, by means of atomic force interaction. The vibration amplitude of the resonator is quantified according to the normal of the surface of the resonator. A 10 MHz SC-cut BVA quartz crystal resonator with adherent electrodes are studied. This new analysis allows the mapping of the elastic properties of the resonator to be made

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Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International

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