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A cost-effective 0.25 μm Leff BiCMOS technology featuring graded-channel CMOS (GCMOS) and a quasi-self-aligned (QSA) NPN for RF wireless applications

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12 Author(s)
Chai, F.K. ; Digital DNA Lab., Motorola Inc., Mesa, AZ, USA ; Kyono, C. ; Ilderem, V. ; Kaneshiro, M.
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A cost-effective 0.25 μm Leff graded-channel BiCMOS technology is reported. GCMOS devices offer superior transconductance and short-channel effects to transistors with conventional laterally uniform channel doping. A complete suite of active and passive devices is offered

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Bipolar/BiCMOS Circuits and Technology Meeting, 2000. Proceedings of the 2000

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