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Sub-femtofarad capacitive sensing for microfabricated transducers using correlated double sampling and delta modulation

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4 Author(s)
Ranganathan, S. ; Case Western Reserve Univ., Cleveland, OH, USA ; Inerfield, M. ; Roy, S. ; Garverick, S.L.

The theory, design, and measured performance of a circuit which measures very small capacitances, particularly suitable for microfabricated sensors relegated to a high parasitic environment, is presented. The circuit uses an existing capacitive sensing ASIC configured as a delta modulator to achieve a sense resolution of 0.53 fF at a 6-kHz sample rate in the presence of board-level parasitics. The applicability of the circuit to microfabricated sensors has been successfully demonstrated using a bulk-micromachined vertical transducer that is similar to many pressure sensors and accelerometers.

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Circuits and Systems II: Analog and Digital Signal Processing, IEEE Transactions on  (Volume:47 ,  Issue: 11 )