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Operation management interface for foundry operation users

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4 Author(s)
Chien-Chung Huang ; Taiwan Semicond. Manuf. Co., Taiwan ; Yu-Fong Huang ; Chu, J. ; Chen, T.

This paper introduces the experiences of TSMC to develop a useful operation user interface (OPI) in which the managerial and operational knowledge of experienced production managers, on-line supervisors, and operators are embedded. This new OPI (also named OMI) integrates both the operational and managerial information to provide fab users a powerful decision support system. Furthermore, some foolproof designs are also embedded in this OMI to prevent operators from mis-operations. The OMI consists of six main functions: (1) wafer selection, (2) general wafer operation, (3) special wafer operation, (4) production equipment operation, (5) area function, and (6) paperless bulletin system

Published in:

Semiconductor Manufacturing Technology Workshop, 2000

Date of Conference: