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A MEMS variable optical attenuator

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3 Author(s)
Wood, R. ; Cronos Integrated Microsyst., Research Triangle Park, NC, USA ; Dhuler, V. ; Hill, E.

The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path

Published in:

Optical MEMS, 2000 IEEE/LEOS International Conference on

Date of Conference: