The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented
Published in:
Optical MEMS, 2000 IEEE/LEOS International Conference on
Date of Conference: 2000