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Development of 4×4 MEMS optical switch

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6 Author(s)
Kato, Y. ; Central Res. Lab., Japan Aviation Electron. Ind. Ltd., Tokyo, Japan ; Mori, K. ; Mase, T. ; Takahashi, A.
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We present a design and experimental results of a 4×4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors

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Optical MEMS, 2000 IEEE/LEOS International Conference on

Date of Conference: