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Temperature dependent characteristics of the JPL silicon MEMS gyroscope

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4 Author(s)
K. Shcheglov ; Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA ; C. Evans ; R. Gutierrez ; T. K. Tang

Advances in aeronautics and space technology have created a need for miniaturized navigation instruments such as gyroscopes, a need which is currently being addressed by a number of micromachined designs. While micromachined devices have already proven their advantages being light-weight and low-power, the performance limitations of these devices have not been thoroughly investigated. In particular the effects of the temperature environment on the performance is of great interest since they can be a dominant source of error in micromachined devices. We have investigated the temperature-dependent drift and noise characteristics of a packaged silicon MEMS gyroscopes. Packaged devices were subjected to various temperatures environments between -60 and +60°C, and their resonant frequencies, signal drifts and quadrature drifts were monitored. The results obtained from these tests point out the mechanisms of temperature-dependent and temperature-independent drift and suggest a scheme for temperature compensation

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Aerospace Conference Proceedings, 2000 IEEE  (Volume:1 )

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