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This paper describes a new method for geometrical error compensation of precision motion systems. The compensation is carried out with respect to an overall geometrical error model which is constructed from the individual error components associated with each axis of the machine. These error components are modeled using radial basis functions (RBFs), thus dispensing with the conventional look-up table. The adequacy and clear benefits of the proposed approach are illustrated from an application to an XY table
Published in:
Instrumentation and Measurement, IEEE Transactions on
(Volume:49
,
Issue:
5
)
Date of Publication: Oct 2000
- Page(s):
- 984 - 991
- ISSN :
- 0018-9456
- INSPEC Accession Number:
- 6738579
- Digital Object Identifier :
- 10.1109/19.872918
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Oct 2000
- Sponsored by :
- IEEE Instrumentation and Measurement Society
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