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Thick-film PZT-silicon micromechanical resonator

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2 Author(s)
S. P. Beeby ; Dept. of Electron. & Comput. Sci., Southampton Univ., UK ; N. M. White

A micromechanical silicon beam resonator in which the vibrations are driven and detected by thick-film printed piezoelectric elements is presented. Standard micromachining and thick-film processes have been successfully combined to fabricate the device. The resonator, 2 mm long and 0.52 mm wide has a fundamental mode in air at 56.5 kHz with a Q-factor of 70

Published in:

Electronics Letters  (Volume:36 ,  Issue: 19 )