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Application of CW-CRDS to monitor and control chemical vapor deposition

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3 Author(s)

Continuous wave excitation cavity ring-down spectroscopy (CW-CRDS) is being developed for real time chemical sensing of volatile CVD byproducts (e.g. HF, H/sub 2/O) and as a quantitative and robust metrology tool for advanced process control methodologies.

Published in:

Electronic-Enhanced Optics, Optical Sensing in Semiconductor Manufacturing, Electro-Optics in Space, Broadband Optical Networks, 2000. Digest of the LEOS Summer Topical Meetings

Date of Conference:

24-28 July 2000