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Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner

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4 Author(s)
Sang-Soon Ku ; Dept. of Mech. Eng., Illinois Univ., Chicago, IL, USA ; Pinsopon, U. ; Cetinkunt, Sabri ; Nakajima, S.

A nanometric precision three-degrees-of-freedom positioner is designed and fabricated. Actuation is based on piezoelectric stacks. Capacitive gap sensors with less than 1.0-nm resolution are used for position feedback. In order to design a proper closed-loop controller, the open-loop characteristics of the nanopositioner (static stiffness, hysteresis, drift, frequency response, and the coupling effects) are experimentally investigated. A cerebellar model articulation controller neural network control algorithm was applied in order to provide real-time learning and better tracking capability compared to a standard proportional-integral-derivative control algorithm

Published in:

Mechatronics, IEEE/ASME Transactions on  (Volume:5 ,  Issue: 3 )

Date of Publication:

Sep 2000

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