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Parallel-beam sensor/actuator unit and its application to the gyroscope

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5 Author(s)
Sato, H. ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; Fukuda, T. ; Arai, F. ; Itoigawa, K.
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Proposes application of a parallel-beam structure to the gyroscope. The parallel-beam structure has the following significant features: 1) the tip moves in parallel at the end; 2) this structure converts the small displacement into a large concentrated strain; 3) even though some units are piled up, each unit does not interfere with another; and 4) the lateral rigidity is high. We analyzed these basic features by finite-element method analysis. We have proposed the parallel-beam sensor/actuator unit using this structure, and a new gyroscope. We show two methods to improve its performance; these are resonant frequency control and mechanical coupling suppression. It is concluded that the proposed structure is suited to the gyroscope

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Mechatronics, IEEE/ASME Transactions on  (Volume:5 ,  Issue: 3 )