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Vertical adjustment in surface-micromachined free-space micro-optical bench

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4 Author(s)
Lin, L.Y. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Shen, J.L. ; Lee, S.S. ; Wu, M.C.

Summary form only given. We have demonstrated a novel optical beam-steering device for vertical adjustment of the optical beams in the surface-micromachined free-space Si micro-optical bench. Vertical adjustment as large as 140 /spl mu/m has been realized. When combined with an integrated microlens, a vertical scanning angle of 5.5/spl deg/ is also demonstrated.

Published in:

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Date of Conference:

2-7 June 1996