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A neural-network approach to recognize defect spatial pattern in semiconductor fabrication

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2 Author(s)
Fei-Long Chen ; Dept. of Ind. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Shu-Fan Liu

Yield enhancement in semiconductor fabrication is important. Even though IC yield loss may be attributed to many problems, the existence of defects on the wafer is one of the main causes. When the defects on the wafer form spatial patterns, it is usually a clue for the identification of equipment problems or process variations. This research intends to develop an intelligent system, which will recognize defect spatial patterns to aid in the diagnosis of failure causes. The neural-network architecture named adaptive resonance theory network 1 (ART1) was adopted for this purpose. Actual data obtained from a semiconductor manufacturing company in Taiwan were used in experiments with the proposed system. Comparison between ART1 and another unsupervised neural network, self-organizing map (SOM), was also conducted. The results show that ART1 architecture can recognize the similar defect spatial patterns more easily and correctly

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:13 ,  Issue: 3 )