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The intertool profile interchange format: a technology CAD environment approach [semiconductor technology]

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2 Author(s)
Wong, A.S. ; Electron. Res. Lab., California Univ., Berkeley, CA, USA ; Neureuther, Andrew R.

The binary profile interchange format (BPIF) defines a set of objects and a library of functions which describe an intertool version of the PIF, a representation for semiconductor wafer information. The BPIF toolkit function library enables technology computer-aided design (TCAD) tools, such as process and device simulators, to access PIF data through a common interface, thus facilitating tool integration and encouraging utility sharing. This approach defines a toolkit that is easy to use, and which meets the tool integration and performance needs within a TCAD environment. An experimental BPIF toolkit, based on the C language and the OCT data manager is described in detail. Examples are shown of how TCAD tools may use the toolkit to `randomly' access wafer data, such as grids and geometries, within a graph of PIF objects. A BPIF package supporting the use of the intertool PIF within the PROSE TCAD environment, which includes a link to the PIF intersite file format, is then presented

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:10 ,  Issue: 9 )