By Topic

An anti-reflection coating for silicon optics at terahertz frequencies

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Gatesman, A.J. ; Submillimeter Wave Technol. Lab., Massachusetts Univ., Lowell, MA, USA ; Waldman, J. ; Ji, M. ; Musante, C.
more authors

A method for reducing the reflections from silicon optics at terahertz frequencies has been investigated. In this study, we used thin films of parylene as an anti-reflection (AR) layer for silicon optics and show low-loss behavior well above 1 THz. Transmittance spectra are acquired on double-sided-parylene-coated, high-resistivity, single-crystal silicon etalons between 0.45 THz and 2.8 THz. Modeling the optical behavior of the three-layer system allowed for the determination of the refractive index and absorption coefficient of parylene at these frequencies. Our data indicate a refractive index, n, of 1.62 for parylene C and parylene D, and a reasonably modest absorption coefficient make these materials a suitable AR coating for silicon at terahertz frequencies. Coatings sufficiently thick for AR performance reduced the average transmittance of the three-layer system by <10% compared to a lossless AR coating with an ideal refractive index

Published in:

Microwave and Guided Wave Letters, IEEE  (Volume:10 ,  Issue: 7 )