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Advanced power copper technology for SMARTMOSTM application designs

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9 Author(s)
Pages, I. ; Motorola Semicond., Toulouse, France ; Baird, B. ; Wang, J. ; Sicard, T.
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Cost effective automotive applications and the related circuit designs are requiring new SMARTMOSTM technology extensions to manage energy capability and metal debiasing in smart power devices. A thick copper metallization scheme, POWER COPPER, has been integrated and characterized in the circuit design of two electronic modules for automotive applications

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Power Semiconductor Devices and ICs, 2000. Proceedings. The 12th International Symposium on

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